Supply, Delivery, Installation, Commissioning, and Validation of an Integrated Glove Box-Linked Dual Atomic Layer Deposition (ALD) Reactor System with Collocated Ellipsometer System for Tyndall, UCC

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1. At a glance

2. Scope of Work

The contract requires the supply, delivery, installation, commissioning, calibration, and validation of an integrated system comprising a dual Atomic Layer Deposition (ALD) reactor linked to a glove box, and a collocated ellipsometer. This advanced scientific equipment is intended for use at the Tyndall National Institute, University College Cork.

The scope of work encompasses the following key components and activities:

• Integrated System:
• One (1) high-quality linking glove box module.
• A minimum of one (1) Atomic Layer Deposition (ALD) reactor (Reactor 1).
• A minimum of one (1) Atomic Layer Deposition (ALD) reactor (Reactor 2).
• A minimum of one (1) ellipsometer system.
• Glove Box Module Requirements:
• Must include at least one (1) ante-chamber for loading/unloading of 200 mm wafer carriers and ALD reactor substrate holders.
• ALD Reactor Requirements:
• Each ALD reactor must provide independent venting of its chamber and load-lock assembly.
• Each reactor must include one (1) dry backing pump for both the reaction chamber and load-lock assembly.
• Ellipsometer System:
• Must be collocated with the ALD reactor system.
• Ancillary Equipment:
• The system must include a minimum of one (1) dry backing pump for both the reaction chamber and load-lock assembly.
• Services:
• Supply: Provision of all specified equipment.
• Delivery: Transportation of the equipment to the Tyndall National Institute.
• Installation: Physical setup and integration of all system components.
• Commissioning: Verification that the system operates according to specifications.
• Calibration: Adjustment of the system for accurate measurements.
• Validation: Formal confirmation that the system meets all specified requirements and is fit for purpose.
• Training:
• Training for a minimum of two (2) laboratory staff by fully qualified personnel for a minimum of three (3) days immediately after installation.

The estimated expenditure for the Goods under this contract is €1,800,000 (excluding VAT) over the contract term and any potential extensions.

3. Background & buyer context

University College Cork (UCC), specifically the Tyndall National Institute, is procuring this integrated Atomic Layer Deposition (ALD) reactor system with a collocated ellipsometer. The procurement aligns with UCC's strategic objectives in advanced materials research and development. The Tyndall National Institute is a leading European research centre in information and communications technology, and this equipment is essential for its ongoing research activities. The tender is conducted under an open procedure, indicating a desire to engage with the broader market for this specialised scientific equipment.

4. Eligibility & selection criteria

Bidders must meet the following mandatory minimum requirements to be considered for this tender:

• Turnover requirement:
• Minimum average annual turnover of €3,600,000 per annum for each of the last 3 years.
• Insurance:
• Employer's Liability: €13 Million (on an each and every occurrence basis).
• Public Liability: €6.5 Million (on an each and every occurrence basis).
• Product Liability: €6.5 Million (on an aggregate basis).
• Professional Indemnity: €6.5 Million (each and every claim or in the annual aggregate).
• Certifications:
• Not specified for this tender.
• Past experience:
• Must provide three (3) examples of successfully delivered contracts, or part thereof, within the last 5 years, similar in nature to the supplies, installation, commissioning, and validation required.
• Minimum level required: Demonstration of successful delivery of three (3) previous comparable projects/contracts involving the suite or part thereof, delivered in the last 5 years.
• Personnel:
• Not specified for this tender, beyond the requirement for qualified personnel to provide training.
• Geographic / facility constraints:
• Not specified for this tender.

5. Award criteria & scoring

The award criteria will determine the most economically advantageous tender. The tender evaluation will be split between quality and price.

Criterion Weight (%) Sub-criteria